Share
Process Variations in Microsystems Manufacturing (Microsystems and Nanosystems) (in English)
Michael Huff (Author)
·
Springer
· Hardcover
Process Variations in Microsystems Manufacturing (Microsystems and Nanosystems) (in English) - Michael Huff
$ 161.04
$ 169.99
You save: $ 8.95
Choose the list to add your product or create one New List
✓ Product added successfully to the Wishlist.
Go to My WishlistsIt will be shipped from our warehouse between
Tuesday, July 02 and
Wednesday, July 03.
You will receive it anywhere in United States between 1 and 3 business days after shipment.
Synopsis "Process Variations in Microsystems Manufacturing (Microsystems and Nanosystems) (in English)"
This book thoroughly examines and explains the basic processing steps used in MEMS fabrication (both integrated circuit and specialized micro machining processing steps. The book places an emphasis on the process variations in the device dimensions resulting from these commonly used processing steps. This will be followed by coverage of commonly used metrology methods, process integration and variations in material properties, device parameter variations, quality assurance and control methods, and design methods for handling process variations. A detailed analysis of future methods for improved microsystems manufacturing is also included. This book is a valuable resource for practitioners, researchers and engineers working in the field as well as students at either the undergraduate or graduate level.
- 0% (0)
- 0% (0)
- 0% (0)
- 0% (0)
- 0% (0)
All books in our catalog are Original.
The book is written in English.
The binding of this edition is Hardcover.
✓ Producto agregado correctamente al carro, Ir a Pagar.