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Manufacturing Techniques for Microfabrication and Nanotechnology (in English)
Marc J. Madou
(Author)
·
CRC Press
· Hardcover
Manufacturing Techniques for Microfabrication and Nanotechnology (in English) - Madou, Marc J.
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Origin: United Kingdom
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Synopsis "Manufacturing Techniques for Microfabrication and Nanotechnology (in English)"
Designed for science and engineering students, this text focuses on emerging trends in processes for fabricating MEMS and NEMS devices. The book reviews different forms of lithography, subtractive material removal processes, and additive technologies. Both top-down and bottom-up fabrication processes are exhaustively covered and the merits of the different approaches are compared. Students can use this color volume as a guide to help establish the appropriate fabrication technique for any type of micro- or nano-machine.
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All books in our catalog are Original.
The book is written in English.
The binding of this edition is Hardcover.
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